| 摘要 |
The invention refers to a chuck pallet (1.3) with solid groove-sidewalls (2.3) for clamping chucks (1.1), whereby the x-y-references (2.5) of the chuck pallet (1.3) are allocated in the same plane (2.1) as the z-references (2.1) and the x-y-references (2.5) are also allocated at the solid groove-sidewalls (2.3). The solid groove-sidewalls (2.3) have thereby a tapered profile. |
