| 摘要 |
The present invention relates to a bubbler for a solid precursor, capable of minimizing a waste of precursors, and always equally supplying the precursors by preventing a channeling effect of the precursors in a container. The bubbler for a solid precursor includes: a container sealed and containing powder type precursors inside; a carrier gas injecting pipe supplying carrier gas into the container to mix and transfer the precursors in the container; a discharge pipe discharging the precursors, mixed with the carrier gas, to the outside of the container; and a carrier gas dispersing unit formed to make the precursors float above the bottom surface of the container, and evenly dispersing the carrier gas to supply the gas to the precursors. |
