APPARATUS FOR PRODUCING POLYSILICON AND PREPARATION OF POLYSILICON USING SAME

摘要

According to the present invention, provided are a manufacturing apparatus of polysilicon and a manufacturing method of polysilicon using the same, which comprises: a reaction pipe equipped with a reaction gas supply pipe, and equipped with a main body whose inner side is applied with a voltage having fixed polarity; an inner structure installed inside the reaction pipe for applying a voltage having polarity opposed to the voltage applied to the inner side of the main body; a power supplying means for applying the voltage to the inner side of the main body and the inner structure; a reduction gas supply pipe for supplying reduction gas to the inside of the reaction pipe; and a reaction space for precipitating silicon by making the reduction gas react with the reaction gas by plasma formed by the voltage having opposite polarity applied to the inner side of the main body and the inner structure.