| 摘要 |
A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen;
- Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position,
which method additionally comprises the following steps:
- In a first sampling session S 1 , gathering detector data from a first collection P 1 of sampling points distributed sparsely across the specimen;
- Repeating this procedure so as to accumulate a set {P n } of such collections, gathered during an associated set {S n } of sampling sessions, each set with a cardinality N > 1;
- Assembling an image of the specimen by using the set {P n } as input to an integrative mathematical reconstruction procedure,
wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {P n }. |
