Techniques for removing material from a substrate are provided. A laser beam is focused at a distance from the surface to be treated. A gas is provided at the focus point. The gas is dissociated using the laser energy to generate gas plasma. The substrate is then brought in contact with the gas plasma to enable material removal.
申请公布号
EP2956270(A1)
申请公布日期
2015.12.23
申请号
EP20140751934
申请日期
2014.02.13
申请人
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
发明人
ELHADJ, SELIM;BASS, ISAAC LOUIS;GUSS, GABRIEL MARK;MATTHEWS, MANYALIBO J.