发明名称 |
Localized, In-Vacuum Modification of Small Structures |
摘要 |
A charge transfer mechanism is used to locally deposit or remove material for a small structure. A local electrochemical cell is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber. |
申请公布号 |
EP2570519(A3) |
申请公布日期 |
2015.12.23 |
申请号 |
EP20120184772 |
申请日期 |
2012.09.18 |
申请人 |
FEI COMPANY |
发明人 |
BOTMAN, AURELIEN;TOTH, MILOS;RANDOLPH, STEVEN;NARUM, DAVID |
分类号 |
C25D5/02;C25D5/00;C25D5/04;C25D17/00;C25D17/12;C25D21/04;C25D21/12 |
主分类号 |
C25D5/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|