DIELECTRIC SILOXANE PARTICLE FILMS, AND DEVICES HAVING THE SAME

摘要

A method for making a dielectric film includes a substrate on which is deposited a siloxane starting material and particles,wherein the siloxane starting material has a siloxane polymer, a siloxane oligomer and/or silane monomers, and wherein the particles have an average particle size of less than 400nm. After deposition, heat and/or electromagnetic energy is applied to the siloxane particle layer so as to cure the layer and form a dielectric film on the substrate. The formed film is is optically transmissive to visible light and transmits at least 80% of the visible light incident thereon, and is electrically insulating and has a sheet resistance of 1000 Ω/sq or more.