| 摘要 |
A purge stocker having a simple configuration while suppressing purge gas consumption, and a purging method are provided. The purge stocker (1) is provided with: a first supply unit (20) equipped with N first purge devices (21) each having a first supporting portion (22) supporting a storage container (F), a first supply pipe (23) for supplying a purge gas to the storage container (F) supported by the first supporting portion (22), and a first flow volume adjustment portion (24) for adjusting the flow volume of the purge gas in the first supply pipe (23); and a second supply unit (30) equipped with M second purge devices (31) each having a second supporting portion (32) supporting the storage container (F), and a second supply pipe (34) for supplying the purge gas to the storage container (F) supported by the second supporting portion (32). When the storage containers (F) are supported by a predetermined number of the second supporting portions (32), the second supply unit (30) supplies the purge gas to the storage containers (F) through the second supply pipes (34). |
