发明名称 |
OPTICAL MEASURING METHODS AND SYSTEM |
摘要 |
The present invention relates to an optical measurement method. The method comprises: obtaining a primitive spectrum by detecting light reflected from a structure on a substrate through a measurement installation; determining a process change of an actual process performed on the substrate by analyzing the primitive spectrum in a wavelength band sensitive to the process change; and correcting the primitive spectrum according to a spectrum offset of the measurement installation, determined based on the process change. |
申请公布号 |
KR20150143162(A) |
申请公布日期 |
2015.12.23 |
申请号 |
KR20140072337 |
申请日期 |
2014.06.13 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SEO, DONG MIN;PARK, JANG IK |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|