| 摘要 |
The present invention relates to a method and an apparatus for applying a coating to an interior surface surrounding a passage of an article. Plasma is generated from a process gas inside the passage of the article, and the coating is deposited from the plasma on the interior surface. The article can be optionally placed inside a passage of a conductive conduit. Either the article or the conductive conduit is coupled to a radio-frequency generator for generating plasma inside the passage of the article. |
