Probe resistance measurement method and semiconductor device with pads for probe resistance measurement

摘要

A probe resistance measuring method includes measuring first resistances at three or more nodes by making contact at least a part of a plurality of probes of a probe unit with three or more pads for resistance measurement based on a first correspondence relation. The measured resistances are stored as a first measurement result and contact resistances of the plurality of probes of the probe unit are calculated based on the first measurement result.

主权项

1. A semiconductor device formed on one semiconductor substrate, comprising:
a semiconductor circuit formed on the one semiconductor substrate; a first pad, a second pad and a third pad arranged over the semiconductor substrate without overlapping in a horizontal plan view, wherein each of the first pad, the second pad and the third pad electrically isolated from the semiconductor circuit; a first wiring line connected between the first pad and the second pad; and a second wiring line connected between the second pad and the third pad, wherein the first wiring line has a same resistance as the second wiring line.