| 发明名称 | Transfer apparatus for transferring electronic devices and changing their orientations | ||
| 摘要 | A transfer apparatus for transferring electronic devices from a wafer to a test handler. The transfer apparatus comprises: i) a rotary device rotatable about an axis; and ii) a plurality of holders configured to hold the electronic devices for transfer from the wafer to the test handler. The plurality of holders are coupled to, and extendable from, the rotary device to pick the electronic devices from the wafer. Specifically, the plurality of holders are arranged circumferentially around, and inclined with respect to, the axis of the rotary device, so as to change an orientation of the electronic devices on the wafer to a desired orientation of the electronic devices on the test handler. | ||
| 申请公布号 | US9218995(B2) | 申请公布日期 | 2015.12.22 |
| 申请号 | US201414258463 | 申请日期 | 2014.04.22 |
| 申请人 | ASM TECHNOLOGY SINGAPORE PTE LTD | 发明人 | Cheng Chi Wah;Lau Kai Fung;Siu Hing Suen |
| 分类号 | B65G47/84;H01L21/677;H01L21/67 | 主分类号 | B65G47/84 |
| 代理机构 | Ostrolenk Faber LLP | 代理人 | Ostrolenk Faber LLP |
| 主权项 | 1. A transfer apparatus for transferring electronic devices from a wafer to a test handler, the transfer apparatus comprising: a rotary device rotatable about an axis; a plurality of holders configured to hold the electronic devices for transfer from the wafer to the test handler, the plurality of holders being coupled to and extendable from the rotary device to pick the electronic devices from the wafer; and a plurality of biasing devices, each biasing device being configured and operative to bias respective ones of the holders towards a retracted position; wherein the plurality of holders are arranged circumferentially around the rotary device, and inclined with respect to the axis of the rotary device, so as to change an orientation of the electronic devices on the wafer to a desired orientation of the electronic devices on the test handler. | ||
| 地址 | Singapore SG | ||