Method of manufacturing semiconductor device and method of processing substrate

摘要

Provided is a method of forming a tantalum oxide-based film having good step coverage while controlling an oxygen concentration in the film. The method includes forming a tantalum nitride layer on a substrate by supplying a source gas including a tantalum and a nitriding agent into a process chamber wherein the substrate is accommodated under a condition where a chemical vapor deposition (CVD) reaction is caused; oxidizing the tantalum nitride layer by supplying an oxidizing agent into the process chamber under a condition where an oxidation reaction of the tantalum nitride layer by the oxidizing agent is unsaturated; and forming on the substrate a conductive tantalum oxynitride film wherein an oxygen is stoichiometrically insufficient with respect to the tantalum and a nitrogen by alternately repeating forming the tantalum nitride layer on the substrate and oxidizing the tantalum nitride layer a plurality of times.

主权项

1. A method of manufacturing a semiconductor device, comprising:
(a) forming on a substrate a conductive tantalum oxide film wherein oxygen is stoichiometrically insufficient with respect to tantalum by alternately repeating: supplying a source gas including the tantalum and a nitriding agent into a process chamber wherein the substrate is accommodated under a condition where a chemical vapor deposition (CVD) reaction is caused to form a tantalum nitride layer on the substrate; and supplying an oxidizing agent into the process chamber to oxidize the tantalum nitride layer under a condition where an oxidation reaction of the tantalum nitride layer by the oxidizing agent is unsaturated while removing nitrogen from the tantalum nitride layer; (b) supplying the source gas including the tantalum and the oxidizing agent into the process chamber with the substrate having the conductive tantalum oxide film formed thereon being accommodated in the process chamber after performing the step (a) to form an insulating tantalum oxide film on the conductive tantalum oxide film; and (c) unloading the substrate having the conductive tantalum oxide film and the insulating tantalum oxide film formed thereon from the process chamber.