Resistive capacitance determination method for multiple-patterning-multiple spacer integrated circuit layout

摘要

A method comprises generating a plurality of multiple patterning decompositions associated with a layout of an integrated circuit. Each of the plurality of multiple patterning decompositions comprises a first pattern associated with a first mask, a second pattern associated with a second mask, the first mask and the second mask being two masks of a multiple patterning mask set, a width value associated with at least one of the first pattern or the second pattern, and a spacing value between the first pattern and the second pattern. A file is generated comprising a plurality of dielectric constant values associated with the plurality of multiple patterning decompositions that are based on the width values and the spacing values.

主权项

1. A method comprising:
generating a plurality of multiple patterning decompositions associated with a layout of an integrated circuit, each of the plurality of multiple patterning decompositions comprising:
a first pattern associated with a first mask;a second pattern associated with a second mask, the first mask and the second mask being two masks of a multiple patterning mask set;a width value associated with at least one of the first pattern or the second pattern; anda spacing value between the first pattern and the second pattern; and generating a file comprising a plurality of dielectric constant values associated with the plurality of multiple patterning decompositions, the plurality of dielectric constant values being based on the width values and the spacing values associated with the plurality of multiple patterning decompositions, wherein generating the file comprises:
simulating, for at least some of the plurality of multiple patterning decompositions, a worst-case performance value yielding the plurality of dielectric constant values for the at least some of the plurality of multiple patterning decompositions; andpopulating the file with the worst-case performance value.