THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING OF THE SAME

摘要

Various embodiments of the present invention provide a thin film transistor array substrate and a manufacturing method thereof. The thin film transistor array substrate includes: a substrate; a gate electrode prepared on the substrate; a gate insulation film on the gate electrode; a semiconductor pattern on the gate insulation film; a source electrode and a drain electrode disposed on the semiconductor pattern and separated from each other; and a hard mask pattern disposed on the source electrode and the drain electrode.