发明名称 FIELD EFFECT TRANSISTOR
摘要 A transistor includes a substrate which has a source region and a drain region which are separated from each other, and a channel region which connects the source region and the drain region, a gate insulating layer structure which is formed on the substrate, a source electrode and a drain electrode which are respectively in the source and the drain on the gate insulating layer structure, a channel which is formed in a channel region on the gate insulating layer structure, and a gate electrode which electrically turns on/off the channel. The gate insulating layer structure includes at least a pair of a low-k dielectric and a high-k dielectric formed in the channel region.
申请公布号 KR20150142509(A) 申请公布日期 2015.12.22
申请号 KR20140071562 申请日期 2014.06.12
申请人 KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 KIM, GYU TAE;JIN, JUN EON;CHOI, JUN HEE
分类号 H01L29/78;H01L21/335 主分类号 H01L29/78
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