发明名称 Divergence-changing device
摘要 A divergence-changing device, comprising a ray source, a substantially telecentric arrangement, having an optical system, which has a first focal point and a first system region and a second system region, and having a ray-deflecting device, which is designed such that the beam of rays from the ray source hits the ray-deflecting device, wherein the main ray would hit/hits the ray-deflecting device at the first focal point or close to the first focal point, and that the ray-deflecting device can feed the beam of rays from the ray source to the first system region at different angles of incidence, wherein the beam of rays imaged by the first system region is deflected onto the second system region by a ray-folding device, wherein the beam of rays is imaged by the second system region such that the beam of rays hits the ray-deflecting device again and leaves the divergence-changing device with a constant position.
申请公布号 US9217853(B2) 申请公布日期 2015.12.22
申请号 US201314403128 申请日期 2013.11.19
申请人 SCANLAB AG 发明人 Rabe Matthias;Böckler Ernst Wilhelm
分类号 G02B26/08;G02B17/08;G02B26/10 主分类号 G02B26/08
代理机构 Arent Fox LLP 代理人 Arent Fox LLP
主权项 1. A divergence-changing device for changing the divergence of an electromagnetic beam of rays in a variably adjustable manner, the electromagnetic beam of rays being described by a main ray and optionally comprising such main ray, as well as a plurality of additional rays, comprising a ray source for providing the beam of rays with at least the plurality of additional rays, a substantially telecentric arrangement having an optical system, which has a first focal point, a first system region and a second system region, and having a ray-deflecting device which is arranged in or closely adjacent to the first focal point and which is arranged and configured in such a way that the beam of rays hits the ray-deflecting device from the ray source, wherein the main ray hits the ray-deflecting device in the first focal point or close to the first focal point, and that it may supply the beam of rays coming from the ray source to the first system region of the optical system at different angles of incidence, wherein the optical system is configured in such a way that the beam of rays is imaged by the first system region in such a way that the main ray of the beam of rays supplied to the first system region is deflected from the first system region in a direction that is substantially independent of the angle of incidence, and so that the plurality of additional rays of the beam of rays is imaged at an angle of divergence with respect to the main ray which is different, when compared to before the imaging, and which depends on the angle of incidence, and a ray-folding device which is configured in such a way that it deflects the beam of rays imaged by the first system region of the optical system to the second system region of the optical system, wherein the beam of rays is imaged by the second system region of the optical system in such a way that the beam of rays hits the ray-deflecting device again, wherein the main ray hits the ray-deflecting device again in the first focal point or close to the first focal point, and wherein the plurality of additional rays hits the ray-deflecting device again, wherein the beam of rays hitting again is deflected by the ray-deflecting device in such a way that the main ray thereof is substantially stationary and not collinear and/or physically separated from the main ray of the beam of rays which hits the ray-deflecting device from the ray source.
地址 Puchheim DE