| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump that prevents the deposition of a reaction product on a cylindrical stator and restrains the transfer of heat by radiation from the cylindrical stator to surrounding members of the cylindrical stator.SOLUTION: A turbo molecular pump 1 comprises: a pump rotor 10 including rotor blades 12 and a rotor cylinder part 13; stator blades 21 opposed to the rotor blades 12; a cylindrical stator 22 opposed to the rotor cylinder part 13; a base 20 that houses the cylindrical stator 22; and a stator heating part 28 that heats the cylindrical stator 22. The emissivity of an outer surface S3 of the cylindrical stator 22 and the emissivity of outer surfaces S4, S7, S5, and S6 that are outer surfaces of the rotor cylindrical part 13, the base 20, the rotor blades 12, and the stator blades 21 that are surrounding members opposed to the cylindrical stator 22 and are opposed to the cylindrical stator 22 are smaller than the emissivity of outer surfaces S1 that are outer surfaces of the rotor blades 12 and are opposed to the stator blades 21. |
