| 摘要 |
PROBLEM TO BE SOLVED: To provide a film deposition apparatus with high practicality such that a flexible substrate can be easily fitted and fixed to a substrate fitting part in a no-wrinkle state.SOLUTION: In a film deposition apparatus that fits and fixes a flexible substrate 1 to a substrate fitting part 2 and forms a thin film on the flexible substrate 1, the substrate fitting part 2 to which the flexible substrate 1 is fitted and fixed by detachably gripping a peripheral part thereof is provided with a substrate arrangement opening part 3 where the flexible substrate 1 is arranged in a disposed state, a convex-shape substrate reception part 4 which sticks and abuts on the flexible substrate 1 arranged at the substrate arrangement opening part 3 of the substrate fitting part 2, and an energizing grip mechanism 5 which grips the peripheral part of the flexible substrate 1 at the substrate fitting part 2 and fits and fixes the flexible substrate 1 by drawing and energizing the flexible substrate 1 outward to apply tension. |
