| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure short circuit resistance without breaking a semiconductor element.SOLUTION: An inspection method of a semiconductor element includes: a step S100 of performing voltage application to the semiconductor element; a step S101 of providing electrical conduction through the semiconductor element so that short circuit current flows through the semiconductor element by the voltage application in a first prescribed period; a step S102 of continuing the voltage application to the semiconductor element in a second prescribed period after the first prescribed period is finished and measuring leakage current flowing through the semiconductor element; and a step S105 of acquiring short circuit resistance of the semiconductor element based on the leakage current. The first prescribed period is set to a period in which the short circuit current does not break the semiconductor element, and the second prescribed period is set to a period in which the leakage current does not break the semiconductor element. |
