| 摘要 |
PROBLEM TO BE SOLVED: To perform highly accurate treatment by suppressing accuracy deterioration due to change in environmental temperature.SOLUTION: An imaging module 2 includes: a spatial light modulation element 21 for providing spatial modulation to an incident light beam and emitting the light beam; an imaging element 22 for acquiring the light beam, to which spatial modulation is given by the spatial light modulation element 21, as the image information; and an adjustment member 23 for adjusting a gap between an imaging surface 28 of the imaging element 22 and the spatial light modulation element 21. The adjustment member 23 is operated so as to narrow the gap between the imaging surface 28 and the spatial light modulation element 21 in accordance with temperature rise. |
