| 摘要 |
PROBLEM TO BE SOLVED: To reduce the costs for cleaning.SOLUTION: A liquid supply system 40 includes: a pipeline D3 (a liquid feed line) in which a nozzle N for discharging a coating liquid is connected with one end; a filter device F1, a pump device P1, and a valve V disposed on the pipeline D3; pipelines D4 to D9 (cleaning lines) which are connected with the filter device F1, the pump device P1, and the valve V separately from the pipeline D3; a cleaning fluid source which supplies a cleaning fluid to the filter device F1, the pump device P1, and the valve V; and a control part. The control part causes the cleaning fluid to be supplied from the cleaning fluid source to the filter device F1, the pump device P1, and the valve V through the pipelines D4 to D9. |
