| 摘要 |
The present invention relates to a micromechanical acceleration sensor. The micromechanical acceleration sensor includes: a substrate; a first detecting unit suspended on the substrate to be movable, and detecting first vibration mass, biased at acceleration on the substrate in a first direction, and the bias of the first vibration mass at the acceleration on the substrate in the first direction; a second detecting unit suspended on the substrate to be movable, and detecting second vibration mass, biased at acceleration on the substrate in a second direction vertically extended to the first direction and also biased at acceleration on the substrate in a third direction vertically extended to the first and second directions, and the bias of the second vibration mass at the acceleration on the substrate in the second direction; and a third detecting unit detecting the bias of the second vibration mass at the acceleration on the substrate in the third direction. |
