| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for peeling a laminate, in which an interface is peeled while supplying liquid to an interface between a first substrate and a second substrate and the peeling by liquid can be smoothly performed in a short time, and also to provide a method of manufacturing an electronic device.SOLUTION: A side surface of an inclined laminate 6 is filled with liquid 100. When the peeling is started from this state, the liquid 100 immediately flows into the peeled surface obtained by peeling the interface 24, and while moving the peeled surface downward by gravity, the peeled surface which sequentially appears by the peeling is immediately made wet. That is, the peeling is performed while spreading liquid 100 to the peeling front line by depending on the gravity of the liquid 100. |
