发明名称 OBJECT DISTRIBUTION ANALYSIS DEVICE AND OBJECT DISTRIBUTION ANALYSIS METHOD
摘要 PROBLEM TO BE SOLVED: To provide an object distribution analysis device and an object distribution analysis method capable of analyzing distribution of an object based on statistical grounds.SOLUTION: An object distribution analysis device includes: a coordinate acquisition part which acquires coordinate data of a plurality of objects; and an object pair creation part which creates a plurality of object pairs including two objects out of a plurality of objects. Furthermore, the device includes: an azimuth calculation part for calculating an azimuth of a segment which connects the objects of each object pair to each other; and a first index calculation part for calculating a first index depending on the azimuth of the plurality of object pairs.
申请公布号 JP2015230982(A) 申请公布日期 2015.12.21
申请号 JP20140116883 申请日期 2014.06.05
申请人 TOSHIBA CORP 发明人 IKEDA TAKAHIRO
分类号 H01L21/66 主分类号 H01L21/66
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