| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump that can reliably prevent a stator that is a high-temperature part from coming into contact with a base that is a low-temperature part.SOLUTION: A vacuum pump comprises a cylindrical rotor cylinder part, a cylindrical stator 22 that exhausts gas in cooperation with the rotor cylinder part, and a cylindrical base 20 to which the stator 22 is fixed. The stator 22 does not include a fit structure between itself and the base 20, and is fixed to the base 20 concentrically with the base 20. In this case, because the section of a radial clearance G1 is not a fit structure, it can be set as a sufficiently large clearance in consideration of the thermal expansion of the stator 22, and can reliably prevent the stator 22 from coming into contact with the base 20 due to the thermal expansion. |
