| 摘要 |
PROBLEM TO BE SOLVED: To suppress generation of dot defects in pixels in a manufactured display panel in a method of manufacturing a display panel including steps of forming a passivation layer and a flattening film on a TFT layer and opening a contact hole.SOLUTION: An interlayer insulating layer 107, an upper electrode 108, a passivation layer 1090, and a flattening film 1100 are successively formed and layered on a TFT layer. A resist film 201 is formed on the flattening film; a contact hole 110a is opened by dry etching; and a resist film is stripped. A contact hole 109a is opened by dry etching the passivation layer 1090 by using the flattening film 110 as a mask. The surface of the flattening film 110 and the inside of the contact holes 110a, 109a are cleaned with an alkali solution. After the alkali cleaning, an anode electrode and a bank are formed; a hole transport layer is formed; and then an organic light-emitting layer or the like is formed to form an organic light-emitting functional layer. |
