| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer device capable of achieving acceleration of processing speed, and achieving measurement processing of a sub-nano order.SOLUTION: An interferometer device comprises: an interference optical system for outputting interference signals for monitoring and for measurement on the basis of light from a wavelength sweep light source 1; storage parts 4b, 4b' for storing data extracted from the interference signal for monitoring and data extracted from the interference signal for measurement for each repetition period of the wavelength sweep light source; and an arithmetic part 4c for converting a deviation amount of the sweep start wavelength for each repetition period to an average value of sweep start wavelength fs for each repetition period, into a number sh of deviation of extraction points on the basis of the data for monitoring, abstracting extraction data corresponding to maximum numbers shm of deviation from an extraction end point to an extraction start point and from the extraction start point to the extraction end point for each repetition period, and aligning extraction width H of the data for measurement. By performing Fourier conversion to the data for measurement whose extraction width H is aligned for each repetition period, for determining distance based on phase information &phgr;. |
