| 摘要 |
PROBLEM TO BE SOLVED: To provide a portable rotary apparatus and a film deposition apparatus which are capable of realizing substrate film deposition by planetary gear rotation by a simple work.SOLUTION: A portable rotary apparatus 11 is constituted of: rotary domes 21 which rotate by a servo motor M provided for a vacuum evaporation system 1; substrate holders 12 which are rotatably supported on the rotary domes 21 and mount film-depositing substrates 14 thereon; an inner frame 11a attached on the rotary domes 21 via a bearing for revolution gear; an outer frame 24 which is disposed outside the inner frame 11a and formed so as to be engaged with an outer peripheral side of the substrate holders 12; and connecting arms 41 connecting the inner frame 11a with the outer frame 24. The rotary dome 21 rotates about a revolution axis R1 of a planetary gear mechanism, the substrate holders 12 are held around the revolution axis R1 by the rotary domes 21, and rotatably supported about a rotation axis R2 of the planetary gear mechanism. |
