| 摘要 |
PROBLEM TO BE SOLVED: To provide a size-reduced distance measuring device by integrating an interferometer onto an optical waveguide substrate.SOLUTION: A distance measuring device of the present invention comprises: a light source; a waveguide unit on which a light wave output from the light source is incident; a leans serving as an optical element and transforming the light wave emitted from a first output waveguide of the waveguide unit into parallel light rays; a mirror serving as an optical reflection element, reflecting the light wave passing through the optical element, and returning the reflected light wave to the optical element; and a measuring unit receiving light rays emitted from a plurality of output waveguides of the waveguide unit, and measuring a position of the optical reflection element, the waveguide unit including a phase separation interference circuit constituted by an optical coupler and a hybrid circuit, interfering reference light output from the light source and split by the optical coupler with the reflected light from the optical reflection element, generating a plurality of interference light rays different in phase, emitting the generated interference light rays from the second waveguides, and a phase difference between the reference light and the reflected light being detected by intensities of the light rays detected from outputs from a photodiode of the measuring unit. |
