MINIATURISERET SENSOR OMFATTENDE ET VARMEELEMENT, OG ASSOCIERET FREMSTILLINGSFREMGANGSMÅDE

摘要

The invention relates to a miniaturised sensor having a heating element, and to an associated production method. The sensor includes a substrate, a cavity and a heat-insulating structure suspended above the cavity by areas connecting to the substrate. The heat-insulating structure includes at least two bridges extending above the cavity, the heating element being supported by said bridges, extending transversely thereto.