| 摘要 |
<p>The invention relates to a MEMS inertial sensor, including a frame to which at least a first seismic body and a second seismic body are connected by resilient means such as to be movable in a suspension plane, transducers to keep the seismic bodies vibrating and determine a movement of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conduction means. The transducers comprise at least one electrode rigidly connected to the first seismic body and one electrode rigidly connected to the second seismic body, the two electrodes being arranged such as to allow direct measurement of the relative movement of the seismic bodies relative to one another in the suspension plane.</p> |
