INERTIAL SENSOR MODULE HAVING A HERMETIC SEAL OF FORMING METAL AND MULTI-AXIS SENSOR EMPLOYING THE SAME

摘要

According to the present invention, an inertial sensor module having a metallic hermetic seal and a multi-axis sensor using the same comprise: a sensor body which comprises a plurality of wires connected to either a driving electrode of a sensor or a detecting electrode of the sensor and is formed in a wafer level package (WLP) method on a substrate for a lower cap to detect inertial force; a substrate for an upper cap, which is boned onto the sensor body to protect the sensor body; and a metallic hermetic seal which is isolated from the wires and interposed between the sensor body and the substrate for an upper cap wherein the bonding is metal bonding.