| 摘要 |
PROBLEM TO BE SOLVED: To provide a high accuracy flow measuring device with less characteristic irregularity.SOLUTION: An organic protection film is separated into a first organic protection film formed near a diaphragm and a second organic protection film formed near a pad by providing a region in which the organic protection film is not formed between the diaphragm and the pad, an end portion of the first organic protection film near the pad is apart from the heat generation resistor at a predetermined distance, and an end portion of the seal member near the heat generation resistor is between the end portion of the first organic protection film near the pad and an end portion of the second organic protection film near the pad. |
