| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device capable of neutralizing a work piece appropriately while suppressing up-sizing and high price.SOLUTION: In a processing apparatus (2) including neutralization means (48) for spraying ionized air to a workpiece (11), the neutralization means includes a spray nozzle (50) disposed near the opening of a cleaning housing (44), and capable of approaching the opening and separating therefrom, with the air spray direction being set above the opening, and a guide surface (52) for guiding the flow of air sprayed from the spray nozzle below the spray nozzle. The guide surface has an inclined surface (50a) for guiding advance and retreat of the spray nozzle, and rising toward the opening, and a declining surface (50b) continuous to the upper end of the inclined surface, and declining toward the opening. |
