PRODUCTION APPARATUS AND PRODUCTION METHOD OF CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a production apparatus and a production method of carbon nanotube with which lowering of a growth rate of carbon nanotube is suppressed so that a long-sized carbon nanotube is easily and surely obtained.SOLUTION: In a production apparatus of carbon nanotube, a raw material gas including carbon is supplied onto one or more substrates carrying a catalyst on surfaces thereof, and carbon nanotube is grown on the substrates by chemical vapor deposition. The production apparatus of carbon nanotube includes: a reactor having a supply port to supply the raw material gas and an exhaust port to discharge a gas after the chemical vapor deposition reaction; a substrate holder to hold the one or more substrates and to be mounted in the reactor; and one or more vibrators to apply vibration to the one or more substrates or to the reactor. It is preferable that a part of the multiple vibrators applies vibration to the substrates and the other vibrators apply vibration to the reactor. It is preferable that the one or more vibrators are ultrasonic generators.