| 发明名称 |
INFRARED DETECTOR WITH SWNT-BASED DOUBLE-CANTILEVER AND MANUFACTURE THEREOF |
| 摘要 |
A double-cantilever infrared detector based on single walled carbon nanotube and the manufacture method thereof are provided. The detector comprises: a substrate having a detection window extending through the substrate from the top surface to the bottom surface; two heterogeneous cantilevers, wherein each cantilever is located on the substrate and has a fixed end connected to the substrate and a free end suspended above the detection window; a single walled carbon nanotube film bridged between the two free ends of the two heterogeneous composite cantilevers, wherein the heterogeneous cantilevers include a first material layer and a second material layer located thereon, and the first material layer and the second material layer have different thermal expansion coefficients. |
| 申请公布号 |
US2015364691(A1) |
申请公布日期 |
2015.12.17 |
| 申请号 |
US201514732830 |
申请日期 |
2015.06.08 |
| 申请人 |
South University of Science and Technology of China |
发明人 |
Wang Fei;Zhang Shaoda |
| 分类号 |
H01L51/00;H01L51/44 |
主分类号 |
H01L51/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A double-cantilever infrared detector based on single walled carbon nanotube comprising:
a substrate having a detection window extending through the substrate from a top surface to a bottom surface; two heterogeneous cantilevers, wherein each of the cantilevers is located on the substrate and has a fixed end connected to the substrate and a free end suspended above the detection window; a single walled carbon nanotube film bridged between two free ends of the two heterogeneous cantilevers, wherein the heterogeneous cantilevers comprise a first material layer and a second material layer arranged thereon, the first material layer is made of SiO2, and the second material layer is made of Au. |
| 地址 |
Shenzhen CN |
