发明名称 OUTPUT RESISTANCE TESTING STRUCTURE AND METHOD OF USING THE SAME
摘要 A testing structure includes a first transistor having a first dopant type connected to a current source. The testing structure further includes a second transistor having a second dopant type, opposite to the first dopant type. The second transistor is connected to a device under test (DUT). The second transistor is connected in series with the first transistor in a cascode arrangement. The cascode arrangement is capable of measuring an output resistance of the DUT of greater than 1 mega-ohm (MΩ).
申请公布号 US2015362539(A1) 申请公布日期 2015.12.17
申请号 US201514711900 申请日期 2015.05.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHOU Wen-Shen;KANG Po-Zeng;PENG Yung-Chow
分类号 G01R27/02;G01R27/08 主分类号 G01R27/02
代理机构 代理人
主权项 1. A testing structure comprising: a first transistor having a first dopant type connected to a current source; a second transistor having a second dopant type, opposite to the first dopant type, the second transistor connected to a device under test (DUT), wherein the second transistor is connected in series with the first transistor in a cascode arrangement, and the cascode arrangement is capable of measuring an output resistance of the DUT of greater than 1 mega-ohm (MΩ).
地址 Hsinchu TW