摘要 |
This dicing sheet (1) is provided with a substrate (2), an adhesive layer (3) layered at one surface side of the substrate (2), and a peeling sheet (6) layered at the surface side of the adhesive layer (3) at the reverse of the substrate (2). The arithmetic mean roughness (Ra1) of the second surface of the substrate (2) is at least 0.2 μm, and the arithmetic means roughness (Ra2) of the second surface of the substrate (2) after the dicing sheet (1) is heated for two hours at 130°C is no greater than 0.25 μm. |