发明名称 DICING SHEET
摘要 This dicing sheet (1) is provided with a substrate (2), an adhesive layer (3) layered at one surface side of the substrate (2), and a peeling sheet (6) layered at the surface side of the adhesive layer (3) at the reverse of the substrate (2). The arithmetic mean roughness (Ra1) of the second surface of the substrate (2) is at least 0.2 μm, and the arithmetic means roughness (Ra2) of the second surface of the substrate (2) after the dicing sheet (1) is heated for two hours at 130°C is no greater than 0.25 μm.
申请公布号 WO2015190230(A1) 申请公布日期 2015.12.17
申请号 WO2015JP64181 申请日期 2015.05.18
申请人 LINTEC CORPORATION 发明人 SAIKI NAOYA;YAMAMOTO DAISUKE;YONEYAMA HIROYUKI;INAO YOUICHI
分类号 H01L21/301;C09J7/02;C09J201/00 主分类号 H01L21/301
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