发明名称 CONVEYANCE DEVICE
摘要 The present invention aims to provide a returning device which can improve the workability. The returning device of the present invention is a returning device which returns a processed item mounted on a ring-shaped frame through a tape attached to the back surface, and comprises: a returning arm; a returning head mounted on the returning arm; and, a moving means for moving the returning head. The returning head comprises: a supporting member attached to the returning arm; one or more pair of first adsorbing pads attached to the supporting member to be distanced for the distance corresponding to a first diameter of a first ring-shaped frame having the first diameter, which has a first adsorption maintaining surface for adsorbing and maintaining the first ring-shaped frame; and, one or more pair of second adsorbing pads attached to the supporting member to be distanced for the distance corresponding to a second diameter of a second ring-shaped frame having the second diameter, which is greater than the first diameter, which has a second adsorption maintaining surface for adsorbing and maintaining the second ring-shaped frame. The first adsorption maintaining surface is placed upper than the second adsorption maintaining surface.
申请公布号 KR20150141134(A) 申请公布日期 2015.12.17
申请号 KR20150073868 申请日期 2015.05.27
申请人 DISCO CORPORATION 发明人 SUZUKI MINORU
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址