MICRO PICK UP ARRAY PIVOT MOUNT WITH INTEGRATED STRAIN SENSING ELEMENTS

摘要

Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

主权项

1. A pivot mount comprising:
a pivot platform; a base; a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root; wherein each spring arm includes:
a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other;a first strain sensing element at the first length; anda second strain sensing element at the second length.