| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermopile having a high output and a high S/N by increasing a total number n of thermocouples without much increasing an inner resistance r of the thermopile, to provide a radiation thermometer having high sensitivity, to provide a method for manufacturing a thin film of an organic material, and to provide a multilayer thin film thermopile that is uniform and expensive and has high sensitivity, a radiation thermometer having high sensitivity, and a method for manufacturing the radiation thermometer.SOLUTION: A temperature sensor element includes a thermopile that is formed into a thin film thermally isolated from a substrate and is disposed in a temperature sensitive part, in which the thin film is composed of multilayered thin films, and layered thermopiles are respectively formed in the layered thin films, while the substrate is made to function as a heat sink and has one contact point as a reference temperature of the thermopile. The layered thermopiles are sequentially connected in series to form a composite thermopile, and the serial connection is configured to increase the output of the composite thermopile. A radiation thermometer is fabricated by using the above composite thermopile as a temperature sensor element. |
