| 发明名称 |
MICRO-MECHANICAL LAYER ASSEMBLY |
| 摘要 |
The invention relates to a micro-mechanical layer assembly (100) comprising at least two mechanically active functional layers (10, 20) that are structured independently from one another, said functional layers being arranged vertically above one another, and being functionally coupled to one another. |
| 申请公布号 |
WO2015189044(A1) |
申请公布日期 |
2015.12.17 |
| 申请号 |
WO2015EP61941 |
申请日期 |
2015.05.29 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
STRAUB, RAINER;PINTER, STEFAN;HABERER, DIETMAR;BAADER, JOHANNES;ARMBRUSTER, SIMON;HAUSNER, RALF |
| 分类号 |
B81C3/00 |
主分类号 |
B81C3/00 |
| 代理机构 |
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