| 摘要 |
PROBLEM TO BE SOLVED: To perform replacement work of a container for reserving process liquid, in a short time without using a tool or the like.SOLUTION: In a pipe fitting 1 including a body 30 used for pipes 20, 21 where the process liquid for semiconductor production flowing therethrough has a positive pressure, and into which the pipes 20, 21 are inserted, and nuts 40, 41 being screwed over the body 30 and fastening the pipe inserted thereinto thus connecting the body 30 and the pipes 20, 21, external diameter of the nuts 40, 41 is two times or more of the external diameter of the pipes 20, 21 inserted into the body 30. On the outer peripheral surface of the nuts 40, 41, grips 40c, 41a are formed at more than one points of a protrusion and a recess formed in the length direction of the pipes 20, 21. |
