发明名称 INTERFEROMETER
摘要 PROBLEM TO BE SOLVED: To generate an interference pattern having a large intensity difference in an interferometer using an electromagnetic wave.SOLUTION: An interferometer comprises: a first grating having a periodic pattern for modulating a phase of an electromagnetic wave radiated on an object; a second grating having a periodic pattern for modulating the phase of the electromagnetic wave transmitted by the first grating; and a detector detecting an intensity distribution of the electromagnetic wave transmitted by the second grating. The second grating is disposed in front of or outside of a position at which a self-figure is generated by the first grating, and a distance from the second grating to the detector is equal to or larger than 1.0 m.
申请公布号 JP2015227784(A) 申请公布日期 2015.12.17
申请号 JP20140112781 申请日期 2014.05.30
申请人 CANON INC 发明人 NAGAI KENTARO;HANDA SOICHIRO
分类号 G01N23/20;A61B6/00;G01N23/04 主分类号 G01N23/20
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