| 发明名称 |
IMPRINT APPARATUS, IMPRINT METHOD, METHOD OF MANUFACTURING ARTICLE, AND SUPPLY APPARATUS |
| 摘要 |
The present invention provides an imprint apparatus which molds an imprint material on a substrate using a mold to form a pattern on the substrate, the apparatus including a dispenser configured to discharge the imprint material from a discharge outlet, and a gas supply unit configured to supply a gas which dissolves in the imprint material and decreases a viscosity of the imprint material, wherein the gas supply unit causes the gas to dissolve in the imprint material around the discharge outlet and decreases the viscosity of the imprint material around the discharge outlet, by supplying the gas to the discharge outlet. |
| 申请公布号 |
US2015360394(A1) |
申请公布日期 |
2015.12.17 |
| 申请号 |
US201514737967 |
申请日期 |
2015.06.12 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Yamashita Keiji;Kawasaki Youji |
| 分类号 |
B29C31/04;B29C59/02 |
主分类号 |
B29C31/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imprint apparatus which molds an imprint material on a substrate using a mold to form a pattern on the substrate, the apparatus comprising:
a dispenser configured to discharge the imprint material from a discharge outlet; and a gas supply unit configured to supply a gas which dissolves in the imprint material and decreases a viscosity of the imprint material, wherein the gas supply unit causes the gas to dissolve in the imprint material around the discharge outlet and decreases the viscosity of the imprint material around the discharge outlet, by supplying the gas to the discharge outlet. |
| 地址 |
Tokyo JP |
