发明名称 DIE BONDER AND DIE BONDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a die bonder and a die bonding method capable of subjecting wafers to grade treatment without removing the wafers, in a die bonder having single conveyance lane and single bonding head, or having a plurality of conveyance lanes and a plurality of bonding heads.SOLUTION: The present invention relates to a die bonder and a bonding method having single conveyance lane and single bonding head, or having a plurality of the conveyance lanes and a plurality of the bonding heads. In the die bonder and the bonding method, a classification map of a classified die is prepared, the classification map being obtained by classifying dies with different electrical characteristics included in a wafer for each of a plurality of grades, a die is picked up from the wafer to be bonded on a substrate or a die by a bonding head, and a classified substrate corresponding to the classified die is conveyed by the conveyance lane(s) for each classified substrate unit. On the basis of the classification map, classification control of bonding the classified die to the corresponding classified substrate is performed.
申请公布号 JP2015228532(A) 申请公布日期 2015.12.17
申请号 JP20150186355 申请日期 2015.09.24
申请人 FASFORD TECHNOLOGY CO LTD 发明人 MOCHIZUKI MASAYUKI;MAKI HIROSHI;TANI YUKIO;MOCHIZUKI TAKETO
分类号 H01L21/52 主分类号 H01L21/52
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