EXTRACTING COMPREHENSIVE DESIGN GUIDANCE FOR IN-LINE PROCESS CONTROL TOOLS AND METHODS

摘要

Methods and systems for extracting comprehensive design guidance for in-line process control of wafers are provided. One method includes automatically identifying potential marginalities in a design for a device to be formed on a wafer. The method also includes automatically generating information for the potential marginalities. The automatically generated information is used to set up process control for the wafer.