| 摘要 |
An ozone generation device comprising: a cylindrical tank-shaped container; a plurality of electrode tubes arranged in parallel inside this tank-shaped container, such that the length direction of the electrode tubes follows the axial direction of the tank-shaped container; discharge tubes arranged inside these electrode tubes, each forming a discharge gap; a pair of end plates that penetrate and hold both end sections of the plurality of electrode tubes; a cooling space formed by this pair of end plates and the inner surface of the tank-shaped container divided between this pair of end plates; a cooling medium inlet formed in a lower section on one end side of this cooling space; a cooling medium outlet formed in an upper section on the other end side of this cooling space; a raw material gas inlet provided in an end section side in the axial direction of the tank-shaped container, that introduces the raw material gas and causes same to be to be sent from the other end side of the discharge tubes to the discharge gaps; and an ozone gas outlet provided on the opposite side in the axial direction of the tank-shaped container, being an outlet for ozone gas generated from the raw material gas by silent discharge in the discharge gaps. The ozone generation device is configured such that discharge tubes are not arranged inside electrode tubes, among the plurality of electrode tubes, that have surrounding coolant medium that reaches at least a prescribed temperature as a result of the silent discharge. |
