OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide an optical filter device capable of suppressing reduction in resolution of an interference filter, an optical module, and electronic equipment.SOLUTION: An optical filter device 600 includes: a wavelength-variable filter 5 including a pair of reflective films opposing to each other and a movable substrate 52 where one of the pair of reflective films is disposed; a base 620 where the wavelength-variable interference filter 5 is fixed at one portion; and an attenuation member 650 that is in contact with the wavelength-variable interference filter 5 to attenuate vibrations of the movable substrate 52 (wavelength-variable interference filter 5) with respect to the base 620.